Novel method for detection of mixed-type defect patterns in wafer maps based on a single shot detector algorithm
Tae San Kim, Jong Wook Lee, Won Kyung Lee, So Young Sohn
Topics & Concepts
Single shotWaferSemiconductor device fabricationDetectorComputer sciencePattern recognition (psychology)Process (computing)Convolutional neural networkIntegrated circuitData miningArtificial intelligenceEngineeringTelecommunicationsOpticsPhysicsOperating systemElectrical engineeringIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques