Litcius/Paper detail

Impact of elevated temperature over different properties of CVD SiCN coating developed in Nitrogen gas atmosphere

Soham Das, Dhruva Kumar, Rishikesh Borah, Abhinov Dutta, Spandan Guha

2022Silicon12 citationsDOI

Topics & Concepts

Materials scienceAnalytical Chemistry (journal)CrystalliteThin filmScanning electron microscopeChemical vapor depositionCoatingFourier transform infrared spectroscopySiliconComposite materialChemical engineeringNanotechnologyEngineeringMetallurgyChemistryChromatographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices
Impact of elevated temperature over different properties of CVD SiCN coating developed in Nitrogen gas atmosphere | Litcius