Selective area regrowth and doping for vertical gallium nitride power devices: Materials challenges and recent progress
Houqiang Fu, Kai Fu, Chen Yang, Hanxiao Liu, Kevin Hatch, Prudhvi Peri, Dinusha Herath Mudiyanselage, Bingjun Li, Tae-Hyeon Kim, Shanthan Reddy Alugubelli, Po-Yi Su, D. C. Messina, Xuguang Deng, Chi-Yin Cheng, Reza Vatan Meidanshahi, Xuanqi Huang, Hong Chen, Tsung-Han Yang, Jingan Zhou, Andrew Armstrong, Andrew A. Allerman, Edward T. Yu, Jung Han, Stephen M. Goodnick, David J. Smith, R. J. Nemanich, F. A. Ponce, Yuji Zhao
Topics & Concepts
Materials scienceDry etchingCathodoluminescenceEtching (microfabrication)OptoelectronicsDopingReactive-ion etchingGallium nitrideNanotechnologyScanning electron microscopeAnalytical Chemistry (journal)Layer (electronics)ChemistryComposite materialLuminescenceChromatographyGaN-based semiconductor devices and materialsSemiconductor materials and devicesMetal and Thin Film Mechanics