Effects of residual stress and microstructure on extremely anisotropic grain growth in nanotwinned Cu films
Huai-En Lin, Dinh-Phuc Tran, Guan-Han Lin, Han-Jie Chuang, Chih Chen
Topics & Concepts
Materials scienceResidual stressMicrostructureTexture (cosmology)Composite materialGrain boundaryStress (linguistics)ElectroplatingThermal stabilityAnisotropyGrain growthMetallurgyOpticsLayer (electronics)Image (mathematics)Computer scienceArtificial intelligenceQuantum mechanicsLinguisticsPhysicsPhilosophyMicrostructure and mechanical propertiesMetal and Thin Film MechanicsCopper Interconnects and Reliability