Area-selective atomic layer deposition of high-quality Ru thin films by chemo-selective adsorption of short alkylating agents
Jeong‐Min Lee, Seo‐Hyun Lee, Jieun Oh, Woo‐Hee Kim
Topics & Concepts
Atomic layer depositionTinSubstrate (aquarium)Deposition (geology)Layer (electronics)Materials scienceChemical vapor depositionAdsorptionThin filmSurface modificationInorganic chemistryChemical engineeringNanotechnologyChemistryOrganic chemistryMetallurgyBiologySedimentOceanographyPaleontologyGeologyEngineeringSemiconductor materials and devicesCopper Interconnects and ReliabilityAdvanced Memory and Neural Computing