Bioresorbable Multilayer Organic–Inorganic Films for Bioelectronic Systems
Ziying Hu, Hexia Guo, Dongqi An, Mingzheng Wu, Anika Kaura, Hannah Oh, Yue Wang, Mengjia Zhao, Shuo Li, Quansan Yang, Xudong Ji, Shupeng Li, Bo Wang, Davin Yoo, Phuong Tran, Nayereh Ghoreishi‐Haack, Yevgenia Kozorovitskiy, Yonggang Huang, Rui Li, John A. Rogers
Abstract
Bioresorbable electronic devices as temporary biomedical implants represent an emerging class of technology relevant to a range of patient conditions currently addressed with technologies that require surgical explantation after a desired period of use. Obtaining reliable performance and favorable degradation behavior demands materials that can serve as biofluid barriers in encapsulating structures that avoid premature degradation of active electronic components. Here, this work presents a materials design that addresses this need, with properties in water impermeability, mechanical flexibility, and processability that are superior to alternatives. The approach uses multilayer assemblies of alternating films of polyanhydride and silicon oxynitride formed by spin-coating and plasma-enhanced chemical vapor deposition , respectively. Experimental and theoretical studies investigate the effects of material composition and multilayer structure on water barrier performance, water distribution, and degradation behavior. Demonstrations with inductor-capacitor circuits, wireless power transfer systems, and wireless optoelectronic devices illustrate the performance of this materials system as a bioresorbable encapsulating structure.