Tri-layer contact photolithography process for high-resolution lift-off
Howard Northfield, Oleksiy Krupin, R. Niall Tait, Pierre Berini
Topics & Concepts
PhotolithographyMaterials scienceResistLithographyContact printPhotoresistGratingOptoelectronicsDiffraction gratingStack (abstract data type)Layer (electronics)OpticsDiffractionOpacityNanotechnologyComposite materialComputer sciencePhysicsProgramming languagePlasmonic and Surface Plasmon ResearchPhotonic and Optical DevicesOptical Coatings and Gratings