Characteristics of graphene grown through low power capacitive coupled radio frequency plasma enhanced chemical vapor deposition
Yu-Chen Chang, Chun-Chieh Yen, Hung‐Chieh Tsai, Tsung Cheng Chen, Chia‐Ming Yang, Chia‐Hao Chen, Wei‐Yen Woon
Topics & Concepts
GrapheneRaman spectroscopyMaterials scienceChemical vapor depositionPlasma-enhanced chemical vapor depositionX-ray photoelectron spectroscopyGraphene nanoribbonsAnalytical Chemistry (journal)ArgonOptoelectronicsNanotechnologyChemical engineeringChemistryOpticsChromatographyEngineeringPhysicsOrganic chemistryGraphene research and applicationsDiamond and Carbon-based Materials ResearchGraphene and Nanomaterials Applications