Fabrication of large-area and highly uniform interlaced silicon grating arrays for high-performance SERS substrates
Lei Wu, Huaicheng Zhou, He Wang, Bingjun Yu, Linmao Qian
Topics & Concepts
Materials scienceGratingFabricationNanotechnologyIsotropic etchingNanoimprint lithographySiliconSubstrate (aquarium)Raman spectroscopySurface-enhanced Raman spectroscopyPlasmonLithographyEtching (microfabrication)OptoelectronicsOpticsRaman scatteringPathologyAlternative medicineOceanographyPhysicsMedicineGeologyLayer (electronics)Gold and Silver Nanoparticles Synthesis and ApplicationsForce Microscopy Techniques and ApplicationsNear-Field Optical Microscopy