Temperature-induced stoichiometric changes in thermally grown interfacial oxide in tunnel-oxide passivating contacts
Jana‐Isabelle Polzin, Stefan Lange, Susanne Richter, Anamaria Moldovan, Martin Bivour, Christian Hagendorf, Martin Hermle, Stefan W. Glunz, Frank Feldmann
Topics & Concepts
OxideStoichiometryAnnealing (glass)X-ray photoelectron spectroscopyPassivationMaterials scienceThermal stabilityChemical engineeringDopingLayer (electronics)Analytical Chemistry (journal)ChemistryNanotechnologyComposite materialPhysical chemistryMetallurgyOrganic chemistryOptoelectronicsEngineeringSemiconductor materials and devicesSemiconductor materials and interfacesSilicon and Solar Cell Technologies