Single-shot selective femtosecond and picosecond infrared laser crystallization of an amorphous Ge/Si multilayer stack
В. А. Володин, Yuzhu Cheng, Alexander V. Bulgakov, Yoann Lévy, J. Beránek, Siva S. Nagisetty, Martin Zukerstein, А. А. Попов, Nadezhda M. Bulgakova
Topics & Concepts
Materials scienceFemtosecondGermaniumLaserCrystallizationSiliconOptoelectronicsAmorphous siliconPicosecondAmorphous solidOpticsCrystalline siliconCrystallographyPhysicsChemistryOrganic chemistryLaser Material Processing TechniquesThin-Film Transistor TechnologiesCultural Heritage Materials Analysis