Study of corrosion rate control mechanism based on magnetorheological electro-Fenton composite polishing of single-crystal GaN wafers
Yusen Wu, Jisheng Pan, Hao Wang, Zhuoshan Shen, Tianxin Luan, Qiusheng Yan
Topics & Concepts
Magnetorheological fluidMaterials sciencePolishingSurface roughnessComposite numberComposite materialCorrosionChemical-mechanical planarizationSlurryMetallurgyStructural engineeringEngineeringDamperAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchSemiconductor materials and devices