Litcius/Paper detail

Influence of diamond wire saw slicing parameters on (010) lattice plane beta-gallium oxide single crystal wafer

Pengcheng Gao, Baimei Tan, Fan Yang, Hui Li, Na Bian, Xiaoqin Sun, Mengrui Liu, Ru Wang

2021Materials Science in Semiconductor Processing17 citationsDOI

Topics & Concepts

Materials scienceSlicingWaferDiamondSurface roughnessComposite materialAnisotropyCrystal (programming language)Surface finishOptoelectronicsMechanical engineeringOpticsProgramming languageEngineeringPhysicsComputer scienceAdvanced Surface Polishing TechniquesGa2O3 and related materialsMetal and Thin Film Mechanics