Litcius/Paper detail

Homeostatic growth of dynamic covalent polymer network toward ultrafast direct soft lithography

Di Chen, Chujun Ni, Lulin Xie, Ye Li, Shihong Deng, Qian Zhao, Tao Xie

2021Science Advances51 citationsDOIOpen Access PDF

Abstract

Soft lithography is a complementary extension of classical photolithography, which involves a multistep operation that is environmentally unfriendly and intrinsically limited to planar surfaces. Inspired by homeostasis processes in biology, we report a self-growth strategy toward direct soft lithography, bypassing conventional photolithography and its limitations. Our process uses a paraffin swollen light responsive dynamic polymer network. Selective light exposure activates the network locally, causing stress imbalance. This drives the internal redistribution of the paraffin liquid, yielding controllable formation of microstructures. This single-step process is completed in 10 seconds, does not involve any volatile solvents/reactants, and can be adapted to three-dimensional complex surfaces. The living nature of the network further allows sequential growth of hierarchical microstructures. The versatility and efficiency of our approach offer possibilities for future nanotechnologies beyond conventional microfabrication techniques.

Topics & Concepts

PhotolithographyLithographyMicrofabricationNanotechnologyMaterials scienceMultiple patterningSoft lithographySoft matterPolymerMaskless lithographyResistOptoelectronicsFabricationEngineeringChemical engineeringElectron-beam lithographyComposite materialPathologyColloidLayer (electronics)Alternative medicineMedicineAdvanced Materials and MechanicsPhotochromic and Fluorescence ChemistryPolymer composites and self-healing