Modulation of oxygen vacancies in InSnZnO thin films and applications for high-speed metal-semiconductor-metal ultraviolet photodetectors
Bojia Chen, Jiyuan Zhu, Qi Han, Shice Wei, Yu Zhang, Shen Hu, Xuefeng Wu, David W. Zhang, Qingqing Sun, Rong Zhang, Kai Huang, Ji Li
Topics & Concepts
PhotodetectorMaterials scienceUltravioletOptoelectronicsPhotoconductivityIndium tin oxideIndiumSemiconductorSputteringAmorphous solidThin filmNanotechnologyChemistryOrganic chemistryZnO doping and propertiesGa2O3 and related materialsThin-Film Transistor Technologies