Carbon nanotubes field-effect transistor pressure sensor based on three-dimensional conformal force-sensitive gate modulation
Guanyin Cheng, Haitao Xu, Ningfei Gao, Mengqin Zhang, Hailin Gao, Bihao Sun, Mingxin Gu, Leyong Yu, Yuanchang Lin, Xueqin Liu, Guotian He, Dapeng Wei
Topics & Concepts
Materials scienceField-effect transistorPressure sensorTransistorPiezoresistive effectOptoelectronicsElectrodeCarbon nanotubeSensitivity (control systems)Capacitive sensingSemiconductorNanotechnologyElectronic engineeringElectrical engineeringVoltageChemistryThermodynamicsPhysicsEngineeringPhysical chemistryAdvanced Sensor and Energy Harvesting MaterialsAnalytical Chemistry and SensorsMechanical and Optical Resonators