Ultralow dielectric cross-linked silica aerogel nanocomposite films for interconnect technology
Haryeong Choi, Taehee Kim, Tae-ho Kim, Sunil Moon, SangHyuk Yoo, Vinayak G. Parale, Rushikesh P. Dhavale, Keonwook Kang, Hyunchul Sohn, Hyung‐Ho Park
Topics & Concepts
AerogelMaterials scienceDielectricComposite materialPorosityCapacitanceNanocompositeChemical-mechanical planarizationLow-k dielectricOptoelectronicsPolishingElectrodeChemistryPhysical chemistryAerogels and thermal insulationSilicone and Siloxane ChemistrySurface Modification and Superhydrophobicity