Enhancement of the ozone-sensing properties of ZnO through chemical-etched surface texturing
Weverton Alison dos Santos Silva, Bruno Sanches de Lima, Maria Inês Basso Bernardi, Valmor Roberto Mastelaro
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyOzonePorosityEtching (microfabrication)Scanning electron microscopeAdsorptionHydrochloric acidThin filmChemical stateAnalytical Chemistry (journal)NanotechnologyChemical engineeringComposite materialMetallurgyChemistryEnvironmental chemistryLayer (electronics)EngineeringOrganic chemistryGas Sensing Nanomaterials and SensorsZnO doping and propertiesGa2O3 and related materials