A carbon nanotube@silicon-based three-dimensional porous photo-supercapacitor for self-powered UV detection
Yurong Wang, Huanhuan Du, Dongyang Xiao, Yili Zhang, Wei Wang, Jing Zhang, Xuhui Liu, Jinyue Geng, Fangjing Hu, Leimeng Sun
Topics & Concepts
Materials scienceDeep reactive-ion etchingSupercapacitorOptoelectronicsPhotocurrentCapacitanceCarbon nanotubeSiliconEtching (microfabrication)Reactive-ion etchingNanotechnologyElectrodeChemistryLayer (electronics)Physical chemistrySupercapacitor Materials and FabricationAdvanced Sensor and Energy Harvesting MaterialsGas Sensing Nanomaterials and Sensors