Film thickness effect in c-axis oxygen vacancy-passivated ZnO prepared via atomic layer deposition by using H2O2
Yue Wang, Kyung-Mun Kang, Minjae Kim, Hyung‐Ho Park
Topics & Concepts
CrystallinityMaterials scienceOxygenVacancy defectGrain sizeBand gapZincGrain boundaryLayer (electronics)PassivationSurface roughnessComposite materialMetallurgyOptoelectronicsCrystallographyMicrostructureChemistryOrganic chemistryZnO doping and propertiesGa2O3 and related materialsGas Sensing Nanomaterials and Sensors