The quantitative 6H-SiC crystal damage depth profiling
Marko Gloginjić, Marko Erich, M. Kokkoris, E. Liarokapis, Stjepko Fazinić, Marko Karlušić, Kristina Tomić Luketić, S. Petrović
Topics & Concepts
ChannellingCrystal (programming language)Materials scienceSilicon carbideIonSingle crystalSiliconSpectral lineCrystallographyAnalytical Chemistry (journal)ChemistryPhysicsComposite materialOptoelectronicsComputer scienceOrganic chemistryAstronomyProgramming languageChromatographySilicon Carbide Semiconductor TechnologiesIntegrated Circuits and Semiconductor Failure AnalysisSilicon and Solar Cell Technologies