Ion behavior impact on ITO thin film fabrication via DC magnetron sputtering with external anode
Tianyuan Huang, Chaochao Mo, Meili Cui, Maoyang Li, Peiyu Ji, Haiyun Tan, Xiaoman Zhang, Lanjian Zhuge, Xuemei Wu
Topics & Concepts
Materials scienceAnodeSputteringThin filmIndium tin oxideIonSputter depositionHigh-power impulse magnetron sputteringTransmittanceAnalytical Chemistry (journal)CathodeOptoelectronicsNanotechnologyElectrodeChemistryPhysical chemistryChromatographyOrganic chemistryZnO doping and propertiesThin-Film Transistor TechnologiesAnalytical Chemistry and Sensors