Wafer map defect pattern detection method based on improved attention mechanism
Shouhong Chen, Meiqi Liu, Xingna Hou, Ziren Zhu, Zhentao Huang, Tao Wang
Topics & Concepts
WaferPattern recognition (psychology)Computer scienceArtificial intelligenceFeature (linguistics)Convolutional neural networkBlock (permutation group theory)Process (computing)Semiconductor device fabricationFeature extractionMaterials scienceMathematicsNanotechnologyLinguisticsGeometryOperating systemPhilosophyIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques