Fluorinated intrinsic low-k materials at high frequency with good dielectric performance and excellent hydrophobicity
Gang Huang, Rongrui Shi, Jing Sun, Qiang Fang
Topics & Concepts
BenzocyclobuteneMaterials scienceDouble bondDielectricBoilingChemical engineeringPolymer chemistryComposite materialOrganic chemistryChemistryOptoelectronicsEngineeringSynthesis and properties of polymersCopper Interconnects and ReliabilitySilicone and Siloxane Chemistry