Litcius/Paper detail

MoS2 Thin Films Grown by Sulfurization of DC Sputtered Mo Thin Films on Si/SiO2 and C-Plane Sapphire Substrates

N. Akçay, М. С. Тиванов, Süleyman Özçelik

2021Journal of Electronic Materials15 citationsDOIOpen Access PDF

Topics & Concepts

SapphireMaterials scienceX-ray photoelectron spectroscopyThin filmScanning electron microscopeChemical vapor depositionAnalytical Chemistry (journal)Molybdenum disulfideSubstrate (aquarium)CrystallizationSiliconSputteringCrystallographyChemical engineeringOpticsOptoelectronicsNanotechnologyChemistryComposite materialChromatographyEngineeringLaserPhysicsOceanographyGeology2D Materials and ApplicationsMXene and MAX Phase MaterialsChalcogenide Semiconductor Thin Films