Impacts of oxygen source on band alignment of ALD Al2O3/(α-, ε-)Ga2O3 interface
Yan Zuo, Qian Feng, Tao Zhang, Haifeng Luo, Xusheng Tian, Yuncong Cai, Yangyang Gao, Jincheng Zhang, Chunfu Zhang, Hong Zhou, Yue Hao
Topics & Concepts
X-ray photoelectron spectroscopyAtomic layer depositionHigh-resolution transmission electron microscopyAnalytical Chemistry (journal)Pulsed laser depositionChemical vapor depositionSapphireMaterials scienceEpitaxyTransmission electron microscopyThin filmChemistryOptoelectronicsNanotechnologyLayer (electronics)OpticsLaserNuclear magnetic resonancePhysicsChromatographyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques