Damage-free finishing of Lu2O3 by combining plasma-assisted etching and low-pressure polishing
Peng Lyu, Min Lai, Ze Liu, Fengzhou Fang
Topics & Concepts
PolishingMaterials scienceMachinabilityEtching (microfabrication)FluenceMachiningSurface roughnessSurface finishLaserPlasmaElectropolishingOxideLutetiumComposite materialMetallurgyOpticsElectrolyteElectrodePhysicsChemistryLayer (electronics)Quantum mechanicsYttriumPhysical chemistryAdvanced Surface Polishing TechniquesElectronic and Structural Properties of OxidesDiamond and Carbon-based Materials Research