Optical, electrical and mechanical properties of TiN thin film obtained from a TiO2 sol-gel coating and rapid thermal nitridation
Arnaud Valour, Maria Alejandra Usuga Higuita, Gaylord Guillonneau, Nicolas Crespo‐Monteiro, Damien Jamon, Marion Hochedel, Jean–Yves Michalon, Stéphanie Reynaud, Francis Vocanson, Carmen Jiménez, M. Langlet, Christophe Donnet, Yves Jourlin
Topics & Concepts
Materials scienceSol-gelCoatingTinComposite materialThermalThin filmMetallurgyNanotechnologyPhysicsMeteorologyMetal and Thin Film MechanicsZnO doping and propertiesGaN-based semiconductor devices and materials