Sol–gel polishing technology for extremely hard semiconductor substrates
Qiufa Luo, Hailang Wen, Jing Lu
Topics & Concepts
PolishingChemical-mechanical planarizationAbrasiveMaterials scienceSemiconductorDiamondSemiconductor device fabricationSubstrate (aquarium)SapphireMetallurgyOptoelectronicsWaferOpticsLaserPhysicsGeologyOceanographyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics