Experimental and theoretical determination of the role of ions in atomic layer annealing
Scott T. Ueda, Aaron J. McLeod, Youhwan Jo, Zichen Zhang, Jacob Spiegelman, Jeff Spiegelman, Dan Alvarez, D.F. Moser, Ravindra K. Kanjolia, Mansour Moinpour, Jacob Woodruff, Kyeongjae Cho, Andrew C. Kummel
Abstract
The use of a heavier noble gas such as Kr in atomic layer annealing results in higher crystallinity due to higher momentum transfer leading to a more localized and intense surface heating effect occurring over picosecond timescales.
Topics & Concepts
Materials scienceAnnealing (glass)IonCrystallinityPicosecondSurface layerAtomic physicsChemical physicsLayer (electronics)NanotechnologyMetallurgyChemistryOpticsComposite materialPhysicsLaserOrganic chemistrySemiconductor materials and devicesElectronic and Structural Properties of OxidesAdvanced Chemical Physics Studies