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HiPIMS deposition of CuNiTiNbCr high - entropy alloy films: Influence of the pulse width on structure and properties

M. Liu, Xiao‐Ming Chen, Y.T. Li, Xiaokang Zeng, Xiangwei Jiang, Y.X. Leng

2023Vacuum15 citationsDOI

Topics & Concepts

High-power impulse magnetron sputteringMaterials scienceIonizationAlloySputter depositionAmorphous solidPlasmaSputteringHigh entropy alloysComposite materialAnalytical Chemistry (journal)Thin filmIonNanotechnologyChemistryCrystallographyPhysicsQuantum mechanicsOrganic chemistryChromatographyMetal and Thin Film MechanicsHigh-Temperature Coating BehaviorsHigh Entropy Alloys Studies
HiPIMS deposition of CuNiTiNbCr high - entropy alloy films: Influence of the pulse width on structure and properties | Litcius