CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement
Meng-Lin Hsieh, Sheng-Kai Yeh, Jia-Horng Lee, Ming-Ching Cheng, Weileun Fang
Topics & Concepts
Tactile sensorCapacitive sensingMaterials scienceSensitivity (control systems)CapacitanceMicroelectromechanical systemsSIGNAL (programming language)FabricationElectronic engineeringAcousticsElectrodeOptoelectronicsElectrical engineeringEngineeringComputer scienceMedicinePhysicsAlternative medicinePhysical chemistryProgramming languageRobotPathologyChemistryArtificial intelligenceAdvanced Sensor and Energy Harvesting MaterialsTactile and Sensory InteractionsMuscle activation and electromyography studies