Lithographic Processes for the Scalable Fabrication of Micro- and Nanostructures for Biochips and Biosensors
Silvia Fruncillo, Xiaodi Su, Hong Liu, Lu Shin Wong
Abstract
), high resolution (from micrometer down to nanometer scale), accuracy, and reproducibility. This review will compare various fabrication technologies and comment on their resolution limit and throughput, and how they can be related to the device performance, including sensitivity, detection limit, reproducibility, and robustness.
Topics & Concepts
BiochipNanotechnologyFabricationBiosensorMaterials scienceLithographyPhotolithographyScalabilityComputer scienceOptoelectronicsDatabaseAlternative medicinePathologyMedicineNanofabrication and Lithography TechniquesAdvanced Biosensing Techniques and ApplicationsMicrofluidic and Capillary Electrophoresis Applications