Fabrication of TiN coatings using superimposed HiPIMS and MF technique: Effect of target poisoning ratios and MF/HiPIMS pulse on-time ratio
Bih-Show Lou, Muthaiah Annalakshmi, Yu-Wen Su, Wun-Sian Yang, Jyh‐Wei Lee
Topics & Concepts
High-power impulse magnetron sputteringTinMaterials scienceMicrostructureThin filmSputter depositionAnalytical Chemistry (journal)SputteringMetallurgyNanotechnologyChemistryChromatographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials