Compositional defects in a MoAlB MAB phase thin film grown by high-power pulsed magnetron sputtering
Rajib Sahu, Dimitri Bogdanovski, Jan-Ole Achenbach, Marcus Hans, Daniel Primetzhofer, Jochen M. Schneider, Christina Scheu
Abstract
Various compositional defects such as Mo 3 Al 2 B 4 , Mo 4 Al 3 B 4 , Mo 6 Al 5 B 6 and Al 3 Mo, together with MoB MBene, are observed to be coexisting in a MoAlB MAB phase thin film grown at 800 °C by high-power pulsed magnetron sputtering.
Topics & Concepts
Materials scienceSputter depositionThin filmHigh-power impulse magnetron sputteringCavity magnetronPhase (matter)OptoelectronicsSputteringAnalytical Chemistry (journal)NanotechnologyChemistryChromatographyOrganic chemistryMXene and MAX Phase MaterialsMetal and Thin Film MechanicsAdvanced ceramic materials synthesis