Analysis and compensation for nonlinearity of sandwich MEMS capacitive accelerometer induced by fabrication process error
Mengjia Chen, Ruifeng Zhu, Youling Lin, Zhengqian Zhao, Lufeng Che
Topics & Concepts
AccelerometerCapacitanceMicroelectromechanical systemsCapacitive sensingNonlinear systemFabricationProof massCompensation (psychology)Materials scienceOffset (computer science)AcousticsControl theory (sociology)Computer scienceEngineeringOptoelectronicsPhysicsElectrical engineeringElectrodeOperating systemPsychoanalysisAlternative medicineArtificial intelligenceMedicineProgramming languagePathologyControl (management)PsychologyQuantum mechanicsGeophysics and Sensor TechnologyAdvanced MEMS and NEMS TechnologiesAdvanced Measurement and Metrology Techniques