High-speed growth of high-quality polycrystalline diamond films by MPCVD
Kai Chen, Tao Tao, Wenxiao Hu, Yucong Ye, Kaiwen Zheng, Jiandong Ye, Ting Zhi, Xiwei Wang, Bin Liu, Rong Zhang
Topics & Concepts
Materials scienceDiamondChemical vapor depositionCrystalliteResidual stressGrowth rateMicrostructureTorrRaman spectroscopyComposite materialOptoelectronicsOpticsMetallurgyMathematicsThermodynamicsPhysicsGeometryDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites