Controllable fabrication of solid state nanopores array by electron beam shrinking
Zhishan Yuan, Xin Lei, Chengyong Wang
Topics & Concepts
NanoporeMaterials scienceNanotechnologyNanostructureFabricationScanning electron microscopeElectron-beam lithographyCathode rayElectronOptoelectronicsResistComposite materialLayer (electronics)PhysicsMedicineAlternative medicinePathologyQuantum mechanicsNanopore and Nanochannel Transport StudiesAnodic Oxide Films and NanostructuresIon-surface interactions and analysis