Electrochemical jet-assisted precision grinding of single-crystal SiC using soft abrasive wheel
Zhaojie Chen, Shunda Zhan, Yonghua Zhao
Topics & Concepts
Materials scienceGrindingAbrasiveMachiningPolishingSurface roughnessSurface integrityScanning electron microscopeMetallurgyJet (fluid)Surface micromachiningComposite materialChemical-mechanical planarizationSurface finishFabricationThermodynamicsMedicineAlternative medicinePathologyPhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced Machining and Optimization Techniques