The sputtering performance of Ag sputtering targets with different microstructure
Zheda Ning, Yiqing Wang, Sixie Li, Ke Tang, Ming Wen
Topics & Concepts
SputteringMicrostructureAnnealing (glass)Materials scienceThin filmSputter depositionElectrical resistivity and conductivityMetallurgyComposite materialNanotechnologyElectrical engineeringEngineeringZnO doping and propertiesCopper Interconnects and ReliabilityMetal and Thin Film Mechanics