Development and characterization of confocal sputtered piezoelectric zinc oxide thin film
Pallavi Sharma, Zeynel Güler, Nathan Jackson
Topics & Concepts
Materials scienceSputteringThin filmCrystallinityPiezoelectricityNanoindentationPiezoelectric coefficientComposite materialSputter depositionSubstrate (aquarium)OptoelectronicsNanotechnologyOceanographyGeologyAcoustic Wave Resonator TechnologiesZnO doping and propertiesGas Sensing Nanomaterials and Sensors