A high-performance CMUT humidity sensor based on cellulose nanocrystal sensing film
Zhou Zheng, Chunxia Tang, John T. W. Yeow
Topics & Concepts
Materials scienceCapacitive micromachined ultrasonic transducersRelative humidityHumidityCapacitive sensingNanocrystalWaferOptoelectronicsNanotechnologyComposite materialElectrical engineeringPhysicsEngineeringPiezoelectricityThermodynamicsGas Sensing Nanomaterials and SensorsAdvanced Sensor and Energy Harvesting MaterialsAdvanced Fiber Optic Sensors