The role of fluorination during the physicochemical erosion of yttria in fluorine-based etching plasmas
Moritz Kindelmann, Moritz L. Weber, Mark Stamminger, Rahel Buschhaus, E. Wessel, Martin Bram, Olivier Guillon
Topics & Concepts
Materials scienceFluorineEtching (microfabrication)CrystallitePlasmaYttria-stabilized zirconiaCeramicChemical engineeringErosionPlasma etchingComposite materialMineralogyCubic zirconiaMetallurgyChemistryLayer (electronics)GeologyEngineeringPhysicsQuantum mechanicsPaleontologyPlasma Diagnostics and ApplicationsZnO doping and propertiesAdvanced ceramic materials synthesis