Effect of bias voltage on the microstructure and properties of Nb-DLC films prepared by a hybrid sputtering system
Ji Cheng Ding, Haijuan Mei, Seonghee Jeong, Jun Zheng, Qi Min Wang, Kwang Ho Kim
Topics & Concepts
Materials scienceMicrostructureBiasingComposite materialSputter depositionSputteringAmorphous solidHigh-power impulse magnetron sputteringElastic modulusDiamond-like carbonThin filmNanotechnologyVoltageCrystallographyChemistryPhysicsQuantum mechanicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsCarbon Nanotubes in Composites