Firing stability of phosphorus-doped polysilicon passivating contacts: Factors affecting the degradation behavior
Di Kang, Hang Cheong Sio, Di Yan, Josua Stückelberger, Xinyu Zhang, Daniel Macdonald
Topics & Concepts
PassivationDopingMaterials scienceCrystallinityDiffusionDegradation (telecommunications)DielectricSiliconDeposition (geology)Chemical engineeringPhosphorusAnalytical Chemistry (journal)Layer (electronics)MineralogyComposite materialChemistryOptoelectronicsElectronic engineeringMetallurgyEngineeringSedimentPaleontologyThermodynamicsChromatographyPhysicsBiologySilicon and Solar Cell TechnologiesSemiconductor materials and interfacesSemiconductor materials and devices