Study of oxidation behaviour of Ruthenium thin film after thermal annealing in oxygen environment
Shruti Gupta, Mangalika Sinha, Rajnish Dhawan, Ravindra Jangir, A. Bose, Pankaj Gupta, Mukesh Kumar Swami, Mohammed H. Modi
Topics & Concepts
Thin filmAnnealing (glass)RutheniumOxygenMaterials scienceAnalytical Chemistry (journal)Thermal oxidationSubstrate (aquarium)DiffractionLayer (electronics)MineralogyChemistryOpticsMetallurgyNanotechnologyGeologyCatalysisPhysicsBiochemistryOrganic chemistryChromatographyOceanographySemiconductor materials and devicesIon-surface interactions and analysisCopper Interconnects and Reliability