Phase-microstructure of Mo/Si nanoscale multilayer and intermetallic compound formation in interfaces
N. Kumar, А. В. Нежданов, R. M. Smertin, В. Н. Полковников, P. A. Yunin, С. А. Гарахин, Н. И. Чхало, А. И. Машин, Mikhail Kudryashov, Д. А. Усанов
Topics & Concepts
IntermetallicMaterials scienceMicrostructureNanoscopic scalePhase (matter)MetallurgyNanotechnologyAlloyOrganic chemistryChemistrySemiconductor materials and interfacesIntermetallics and Advanced Alloy PropertiesSemiconductor materials and devices