Three anionic surfactants for corrosion inhibition in cobalt CMP: Research on validity and mechanism
Fangyuan Wang, Shihao Zhang, Baimei Tan, Yunhui Shi, Xiaolong Wang, Haoyu Du, Renhao Liu, Xinyu Han
Topics & Concepts
CobaltCorrosionMaterials scienceAdsorptionWettingChemical-mechanical planarizationElectrochemistryChemical engineeringSlurryInorganic chemistryMetallurgyOrganic chemistryPolishingChemistryPhysical chemistryComposite materialElectrodeEngineeringAdvanced Surface Polishing TechniquesAdvanced materials and compositesCorrosion Behavior and Inhibition