Room temperature bonding of diamond/Si with Mo/Au interlayers in atmospheric air
Wang Fei, Kang Wang, Genqiang Chen, Fang Lin, Ruozheng Wang, Wei Wang, Minghui Zhang, Wenbo Hu, Hongxing Wang
Topics & Concepts
DiamondSiliconMaterials scienceScanning electron microscopeWaferAnodic bondingComposite materialLayer (electronics)MetallurgyNanotechnologyDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesMetal and Thin Film Mechanics