Magnetron sputtering of ZnO thick film for high frequency focused ultrasonic transducer
Jinming Ti, Junhong Li, Qingqing Fan, Wei Ren, Qing Yu, Chenghao Wang
Topics & Concepts
Materials scienceTransducerUltrasonic sensorSputter depositionSputteringPiezoelectricityCenter frequencyScanning electron microscopePMUTOptoelectronicsComposite materialAcousticsThin filmOpticsNanotechnologyBand-pass filterPhysicsAcoustic Wave Resonator TechnologiesAdvanced Sensor and Energy Harvesting MaterialsZnO doping and properties